Filipovic, L., Selberherr, S., Mutinati, G. C., Brunet, E., Steinhauer, S., Köck, A., ... & Schrank, F. (2013, July). Modeling spray pyrolysis deposition. In Proceedings of the world congress on engineering (Vol. 2, pp. 987-992).
Abstract—The deposition of a thin tin oxide film allows for the manufacture of modern gas sensors. Spray pyrolysis deposition is used to grow the required thin films, as it can be seamlessly integrated into a standard CMOS processing sequence. A model for spray pyrolysis deposition is developed and implemented within the Level Set framework. Two models for the topography modification due to spray pyrolysis deposition are presented, with an electric and a pressure atomizing nozzle. The resulting film growth is modeled as a layer by layer deposition of the individual droplets which reach the wafer surface or as a CVDlike process, depending on whether the droplets form a vapor near the interface or if they deposit a film only after surface collision.
Keywords: Spray pyrolysis deposition, Tin oxide film, Topography simulation, Level Set, Smart gas sensors
Abstract—The chemical spray pyrolysis technique (SPT) has been, throughout last 3 decades, one amongst the most important techniques to deposit a large type of materials in thin film kind. The prime requisite for getting sensible quality thin film is that the optimization of propaedeutic conditions viz. substrate temperature, spray rate, concentration of solution etc. However, in recent years a stress has been given to a range of atomization techniques like supersonic nebulisation, improved spray reaction, corona spray transformation, electricity spray transformation and microchip primarily based spray transformation. This is often the foremost crucial parameter because it permits management over the scale of the droplets and their distribution over the preheated substrates. An intensive review of thin film materials ready throughout the last ten years is given to demonstrate the flexibility of the chemical SPT. the assorted conditions to get thin films of metal compound, metallic mineral oxides, binary, ternary and quaternary chalcogenides and superconducting oxides are given. The consequences of precursor, dopants, substrate temperature, post tempering treatments, answer concentration etc., on the physico-chemical properties of those films are given likewise. It’s discovered that the properties of thin films rely significantly on the propaedeutic conditions. The properties of the thin film will be simply tailored by adjusting or optimizing these conditions that successively are appropriate for a specific application
Anca, D., Perniu, D., Isac, L., & Enesca, A. Solar Energy Materials Obtained by Spray Pyrolysis Deposition.
Abstract- Efficient and low-cost solar energy conversion devices require large active surfaces of thin oxide films with controlled properties. By increasing the deposition surface, the properties are increasingly difficult to maintain, therefore a careful choice of the deposition technique is required. Spray pyrolysis deposition is a low-cost, up-scalable technique that allows to obtain thin (poly)crystalline films over large surface areas. This paper presents a review on the most important control parameters in SPD, with a focus on organic and polymeric additives. Thin films of TiO2, CuO, CuInS2 and CuSbS2 are used as case studies in the presentation.
Keywords: spray pyrolisys deposition, thin films, solid state solar cells, solar absorbers, photocatalyst, electrochromic oxides
Kozhukharov, S., & Tchaoushev, S. (2013). Spray pyrolysis equipment for various applications. Journal of Chemical Technology and Metallurgy, 48(1), 111-118.
Abstract- The fabrication of all kinds of industrial products is based on the specific combination between the applied methods, and the conditions of syntheses (temperatures, pressures, flow rates and the chemical compositions of gaseous and liquid fluxes, etc.), resulting on the properties and performance of the obtained products. On the other hand, both the methods and the conditions for synthesis depend on the available equipment, which is able to supply suitable conditions for synthesis via Spray Pyrolysis (SP) and further treatments of the desired product. The present work is an attempt to summarize the basic types of equipment, and conditions for obtaining of products for various applications, via the spray pyrolysis method.
Keywords: Spray pyrolysis, Basic concepts, Synthesis, Deposition, Parameters, Conditions.
Perednis, D., & Gauckler, L. J. (2005). Thin film deposition using spray pyrolysis. Journal of electroceramics, 14(2), 103-111.
Abstract- Spray pyrolysis has been applied to deposit a wide variety of thin films. These films were used in various devices such as solar cells, sensors, and solid oxide fuel cells. It is observed that often the properties of deposited thin films depend on the preparation conditions. An extensive review of the effects of spray parameters on film quality is given to demonstrate the importance of the process of optimization. The substrate surface temperature is the most critical parameter as it influences film roughness, cracking, crystallinity, etc. Processes involved in the spray pyrolysis technique are discussed in this review as well.
Keywords: spray pyrolysis, thin films, properties of deposited films